Evansville Vanderburgh Public Library
Lee, Unchul
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Lee, Unchul
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Lee, Unchul
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Etching characteristics and surface analysis of molecular bean epitaxy grown P-type aluminum gallium nitride with boron trichloride/chlorine gases in inductively coupled plasma (ICP) dry etching, Fred Semendy, Phillip Boyd, and Unchul Lee
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